SECS/GEM Communication Integration Guide

This document describes the SECS/GEM communication protocol architecture, SDK usage, and implementation patterns in GST projects. Covers both Host-side (DIASECS) and Equipment-side (DIASECSGEM) implementations.

1. Basic Concepts

1.1 Role Definitions

Role	Description	HSMS Mode	Connection Direction
Host	Factory MES / Host Computer	Active (initiates connection)	Host → EQ
Equipment	Equipment-side controller	Passive (waits for connection)	EQ listens

1.2 Protocol Layers

SECS-II (SEMI E5)     — Message format definition (Stream/Function)
HSMS (SEMI E37)       — TCP/IP transport layer
GEM (SEMI E30)        — Generic Equipment Model (state machine, events, variables)

1.3 Commonly Used Stream/Functions

Message	Direction	Purpose
S1F1/F2	Bidirectional	Are You There / Reply
S1F13/F14	H→E / E→H	Establish Communication
S2F41/F42	H→E / E→H	Remote Command / Ack
S5F1/F2	E→H / H→E	Alarm Report / Ack
S6F11/F12	E→H / H→E	Event Report / Ack
S7F19/F20	H→E / E→H	PP Directory Request / Reply

2. SDK Comparison

	DIASECS (Driver Level)	DIASECSGEM (GEM Level)
Level	Low-level (manual encode/decode)	High-level (automatic state management)
Configuration	Code-based	XML + CSV Profile
Used By	Host	Equipment
GEM State Machine	Must be implemented manually	Built-in automatic management
Message Handling	Manual ItemOut/ItemIn	Event callbacks
Applicable Project	InspectionHost	Inspection Demo (EQ)

3. Host-Side Implementation (DIASECS)

3.1 Connection Setup

_driver = new DIASECS("InspectionHost");
_driver.SECS_Connect_Mode = eSECS_Comm_Mode.HSMS_MODE;
_driver.HSMSDriverSettings = new HSMSParameterSettings()
{
    DeviceId = 0,
    Mode = eHsmsConnectMode.Active,     // Host = Active
    PassiveIP = eqIp,                   // 設備 IP
    PassivePort = eqPort,               // 設備 Port
    EnableLog = true,
    LinkTest = 60,                      // Link Test 間隔（秒）
    T3 = 45, T5 = 10, T6 = 5, T7 = 10, T8 = 5
};
_driver.Init();
_driver.Start();

3.2 Event Subscription

_driver.TCPIPConnectStatusChanged += OnTcpStatusChanged;
_driver.ConnectStatusChanged += OnConnectStatusChanged;      // HSMS Select
_driver.SECSMessageReceived += OnMessageReceived;            // 主要處理器
_driver.SECSMessageSent += OnMessageSent;
_driver.SECSMessageReplyT3 += OnT3Timeout;

3.3 Message Construction (Send)

byte[] buf = new byte[256];
int offset = 0;

// S1F13 Establish Communication
SECSLib.ItemOut(buf, ref offset, eFormat.L, 0);  // Empty List
_driver.Send(1, 13, 1, GetNewSystemBytes(), buf, offset);
//          S  F   W  SystemBytes     Data  Length

3.4 Message Parsing (Receive)

void OnMessageReceived(object sender, SECSMessageReceivedEventArgs e)
{
    int stream = e.Stream;
    int function = e.Function;
    byte[] data = e.RawData;
    int offset = 0;

    switch ((stream, function))
    {
        case (6, 11):  // S6F11 Event Report
            SECSLib.ItemIn(data, ref offset, out eFormat fmt, out int count);  // L:3
            SECSLib.ItemIn(data, ref offset, out fmt, out uint dataid);        // DATAID
            SECSLib.ItemIn(data, ref offset, out fmt, out uint ceid);          // CEID
            // ... 解析 Report Variables
            // 回覆 S6F12
            SendAck(e.SystemBytes, 6, 12, 0);  // ACKC6 = 0
            break;
    }
}

3.5 Mock/Real Dual Mode

// DI 切換
if (useRealSecs)
    services.AddSingleton<ISecsHostService, SecsHostService>();
else
    services.AddSingleton<ISecsHostService, MockSecsHostService>();

4. Equipment-Side Implementation (DIASECSGEM)

4.1 Configuration File Structure

Config/Profile/
├── GemConfig.xml          ← HSMS settings, Timers, feature toggles
├── EqpEvent.csv           ← CEID definitions (equipment events)
├── SystemEvent.csv        ← GEM standard events
├── RemoteCommand.txt      ← RCMD definitions (S2F41 commands)
└── LinkEventReport.txt    ← Event-Report linkage

4.2 GemConfig.xml

<item SECS_Connect_Mode="0" desc="0:HSMS, 1:SECSI" />
<item HSMS_DeviceId="1" />
<item HSMS_Mode="0" desc="0:Passive, 1:Active" />
<item HSMS_PassiveIP="127.0.0.1" />
<item HSMS_PassivePort="7000" />
<item HSMS_T3="45000" />

4.3 High-Level API

// 回報事件（S6F11）
service.ReportEvent(ceid: 101, new Dictionary<uint, object>
{
    { 20001, phaseId },
    { 20002, lotId },
    { 20003, recipeId }
});

// 更新狀態變數（S1F3/F4）
service.UpdateStatusVariable(svid: 10001, currentPhase);

// 設定 Alarm（S5F1）
service.SetAlarm(alid: 1001, isSet: true, "Camera disconnected");

4.4 Remote Command Handler

// S2F41 遠端命令處理
internal class StartCommandHandler : RemoteCommandHandlerBase
{
    public override bool Decode(RemoteControlEventRemoteCommandArgs e,
        out Dictionary<string, string> parameters)
    {
        parameters = new Dictionary<string, string>();
        parameters["PPID"] = GetStringValue(e.Parameters["PPID"]);
        parameters["LOTID"] = GetStringValue(e.Parameters["LOTID"]);
        AckAllParams(e);  // HCACK = 0 (OK)
        return true;
    }
}

5. Common Definition Examples

5.1 CEID (Collection Event ID)

Range	Purpose	Example
1-99	GEM Standard	EquipmentOffline(1), OnlineRemote(2)
100-199	Process events	ProcessStarted(101), ProcessCompleted(102)
200-299	Inspection events	InspectionStarted(201), ImageCaptured(203)
300-399	Cleaning events	CleaningStarted(301), CleaningCompleted(302)
500-599	System/Alarm	AlarmSet(501), AlarmCleared(502)

5.2 SVID (Status Variable ID)

Range	Purpose	Example
1-9	GEM Standard	Clock(1), ControlState(2)
10001-10099	Process status	CurrentPhase(10001), CurrentRecipeId(10002)
10101-10199	Inspection status	ImageCount(10101), CurrentImageIndex(10102)
10201-10299	Motion axis	AxisXPosition(10201), AxisYPosition(10202)
10301-10399	Statistics	TotalProcessed(10301), PassRate(10304)

5.3 RCMD (Remote Command)

Command	Parameters	Description
START	PPID, LOTID	Start process
STOP	—	Stop process
PAUSE	—	Pause process
GO	—	Resume process
PP-SELECT	PPID	Select recipe
REMOTE	—	Switch to remote mode
LOCAL	—	Switch to local mode

5.4 HCACK (Remote Command ACK)

Value	Meaning
0	OK
1	Invalid Command
2	Cannot Perform Now
3	Invalid Parameter
4	Acknowledged Later
5	Already In Condition

6. Related Projects

Project	Role	SDK	Description
InspectionHost	Host	DIASECS	.NET 8 WPF, Mock/Real dual mode
Inspection Demo (EQ)	Equipment	DIASECSGEM	.NET 4.8 WinForms, Plugin architecture
Walton Line1/2/3	Equipment	KGS Common	.NET 4.5, VS 2015
ENR_DUC	Equipment	—	.NET 4.8

7. HSMS Timer Reference

Timer	Default	Purpose
T3	45s	Reply Timeout (waiting for reply)
T5	10s	Connection Separation (reconnect interval after disconnect)
T6	5s	Control Transaction Timeout
T7	10s	Not Selected Timeout (waiting for Select after HSMS connection)
T8	5s	Network Intercharacter Timeout
LinkTest	60s	Link Test Interval (Keep-Alive)

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Document Version: v1.0 | Created: 2026-03-16 | Linear Issue: GST-167